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Vacuum-ultraviolet ellipsometry spectra and structural properties of Pb(Zr,Ti)O3 films
Authors:G. SuchaneckD. Chvostová  ,J. KousalV. ?elezný  ,A. LynnykL. Jastrabí  k,G. GerlachA. Dejneka
Affiliation:
  • a TU Dresden, Solid State Electronics Lab, Mommsenstr. 13, D-01062 Dresden, Germany
  • b Institute of Physics, Academy of Science, Na Slovance 2, 182 21 Prague 8, Czech Republic
  • c MFF UK, V Holešovi?kách 2, 180 00 Praha 8, Czech Republic
  • Abstract:Optical properties of PbZrxTi1 − xO3 material have been actively studied in the visible and near band-gap region, but data in the vacuum-ultraviolet spectral region is rather scarce. In this work we focus on well known interband transitions for the perovskite materials, 2p → , located in VUV spectral region. Dielectric functions of chemical solution deposited and sputtered PZT were obtained in the spectral range 1-8.8 eV. Differences between the absorption maxima for chemical solution deposited and sputtered PbZrxTi1 − xO3 samples near Kahn-Leyendecker 2p →  interband transition were found and are interpreted by change of interatomic distances. This is confirmed by different lattice constants. In the case of PbZrxTi1 − xO3 film with microcracks, the void fraction was estimated from the effective medium approximation. Direct band-gap energies appear to be nearly the same for all reactive sputtered samples weakly depending of Zr/Ti concentration.
    Keywords:PZT film   Vacuum-ultraviolet ellipsometry   Film structure   Optical properties
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