| 透明导电氧化物薄膜的新进展 |
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| 引用本文： | 孟扬,沈杰,蒋益明,陈佾,孔令柱,沃松涛,杨锡良,陈华仙,章壮健. 透明导电氧化物薄膜的新进展[J]. 光电子技术, 2002, 22(3): 125-130,144 |
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| 作者姓名： | 孟扬 沈杰 蒋益明 陈佾 孔令柱 沃松涛 杨锡良 陈华仙 章壮健 |
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| 作者单位： | 复旦大学材料科学系,上海,200433 |
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| 摘 要： | 透明导电氧化物（TCO）薄膜In2O3:Sn和SnO2:F都已经发展成熟，分别大规模应用于平板显示器和建筑两大领域。最近几年，TCO薄膜的研究又进入了一次复兴时期，研究和开发出几类具有明显特色的新型TCO薄膜。ZnO基TCO薄膜有替代In2o3:Sn薄膜的趋势；多元TCO薄膜材料可以调整其性能来满足某些特殊应用的需求；具有高载流子迁移率的In2O3：Mo薄膜为进一步提高TCO薄膜的性能打开了一条新路；真正的p型TCO薄膜为制造透明电子元器件迈出了第一步。
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| 关 键 词： | TCO 透明导电氧化物 薄膜 进展 |
| 文章编号： | 1005-488X(2002)03-0125-06 |
New Progress of Transparent Conductive Oxide Thin Films |
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| Meng Yang Shen Jie Jiang Yiming Chen Yi Kong Lingzhu Wo SongtaoYang Xiliang Chen Huaxian Zhang Zhuangjian. New Progress of Transparent Conductive Oxide Thin Films[J]. Optoelectronic Technology, 2002, 22(3): 125-130,144 |
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| Authors: | Meng Yang Shen Jie Jiang Yiming Chen Yi Kong Lingzhu Wo SongtaoYang Xiliang Chen Huaxian Zhang Zhuangjian |
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| Abstract: | Transparent conductive oxide (TCO) thin films In2O3 : Sn and SnO2 : F have been used commonly in two dominant markets of flat-panel displays and architectural applications respectively. Recently, technology of TCO films has been a renaissance. Some new TCO films were researched and developed. Impurity-doped ZnO films are expected to be alternative materials for In2O3 : Sn. The properties of multicomponent TCO films can meet the requirements of specialized applications. High-mobility In2O3 : Mo film improves the properties of TCO films in another way. True p-type semiconductor TCO films give the possibility to develop transparent electronic devices. |
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| Keywords: | transparent conductive films progress |
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