| MEMS半球谐振陀螺的角速度积分及其FPGA设计 |
| |
| 引用本文： | 赵万良,成宇翔,孙殿竣,唐健,刘朝阳,欧彬,张卫平.MEMS半球谐振陀螺的角速度积分及其FPGA设计[J].半导体光电,2017,38(1):40-44. |
| |
| 作者姓名： | 赵万良 成宇翔 孙殿竣 唐健 刘朝阳 欧彬 张卫平 |
| |
| 作者单位： | 上海航天控制技术研究所惯性工程技术研究中心,上海,201109;上海交通大学电子信息与电气工程学院,微米/纳米加工技术国家级重点实验室,薄膜与微细技术教育部重点实验室,上海市北斗导航与位置服务重点实验室,上海200240 |
| |
| 基金项目： | 国家自然科学基金项目(61574093); 中国航天科技创新基金项目CASC(11GFZ-JJ01-309); 教育部新世纪人才资助计划项目(NCET-10-0583); 科学基金项目(2013ZC57003); 预研基金项目(9140A14010511JW0304); 国家重点实验室基金项目(9140C790405110C7904) |
| |
| 摘 要： | 微电子机械系统(MEMS)半球谐振陀螺是MEMS微陀螺领域的研究热点,能工作在角速度积分模式下,具有体积小、质量轻、功耗低、成本低、对称性高、Q值高,以及精度高等优点.文章给出了一种微型半球谐振陀螺的结构,研究了其工作原理以及检测方法,设计了一种数字式MEMS半球谐振陀螺仪的角速度积分工作模式方案及其FPGA实现方法,以完成目前MEMS半球谐振陀螺的角速度积分模式的控制与检测工作.
|
| 关 键 词： | 微电子机械系统 半球谐振 角速度积分 控制 FPGA |
| 收稿时间： | 2016/6/20 0:00:00 |
Design of MEMS RIG with Hemispherical Resonator and its FPGA Platform |
| |
| ZHAO Wanliang,CHENG Yuxiang,SUN Dianjun,TANG Jian,LIU Zhaoyang,OU Bin,ZHANG Weiping.Design of MEMS RIG with Hemispherical Resonator and its FPGA Platform[J].Semiconductor Optoelectronics,2017,38(1):40-44. |
| |
| Authors: | ZHAO Wanliang CHENG Yuxiang SUN Dianjun TANG Jian LIU Zhaoyang OU Bin ZHANG Weiping |
| |
| Abstract: | The MEMS (Micro-Electro-Mechanical System) HRG(Hemispherical Resonator Gyroscope) as a kind of MEMS gyroscopes is a research hotspot, which can work in the RIG (Rate-Integrating-Gyroscope) mode. The emergence of MEMS gyroscopes has produced sensors with smaller size, lower cost, lighter weight, less consuming power, high symmetry, high Q-factor and high accuracy than previous solutions. In this paper, the structure of a MEMS HRG was proposed and the working principles and detection methods were studied. In order to accomplish the work of control and detection of MEMS RIG mode for MEMS HRG, a digital scheme for the MEMS RIG with hemispherical resonator was developed and a FPGA platform was designed. |
| |
| Keywords: | MEMS hemispherical resonator RIG control FPGA |
| 本文献已被 万方数据 等数据库收录！ |
| 点击此处可从《半导体光电》浏览原始摘要信息 |
|
点击此处可从《半导体光电》下载全文 |
|
