络合剂对316L不锈钢化学机械抛光效果的影响

为提高316L不锈钢化学机械抛光（chemical-mechanical polishing，CMP）效率，针对络合剂类型对316L不锈钢加工效果的影响及影响机制进行研究。以材料去除率（material removal rate，MRR）和表面粗糙度（R_a）为指标，探究络合剂类型（甘氨酸、草酸和柠檬酸）及浓度对抛光效果的影响。利用电化学工作站、接触角测量仪和X射线光电子能谱仪（XPS）分析络合剂对316L不锈钢CMP加工影响机制。结果表明:当甘氨酸质量分数为0.2%时，能够同时获得较高的材料去除率和较低的R_a，分别为210 nm/min和1.613 nm。高浓度的络合剂对316L不锈钢材料去除率的抑制作用来源于络合剂增强了316L不锈钢表面耐蚀性，降低了表面氧化速度。XPS分析表明部分甘氨酸络合物会吸附于316L不锈钢表面产生缓蚀作用。 

Effect of complexing agent on chemical-mechanical polishing effect of 316L stainless steel

To improve the chemical mechanical polishing (CMP) performance of 316L stainless steel, the effect and its mechanism of complexing agent types on the CMP process of 316L stainless steel were studied. The influence of complexing agent types, including glycine, oxalic acid and citric acid, and their concentrations on polishing performance of 316L stainless steel were investigated with material removal rate (MRR) and surface roughness R_a as indexes. Electrochemical workstation, contact angle measuring instrument and X-ray photoelectron spectroscopy (XPS) were performed to analyze the affecting mechanism of complexing agents on 316L stainless steel CMP processing. The results indicated that only when the mass fraction of glycine was 0.2%, both higher MRR of 210 nm/min and lower R_a of 1.613 nm could be obtained. The inhibition effect of complexing agent with high concentration on 316L stainless steel MRR was because the complexing agent enhanced the corrosion resistance and reduced the oxidation rate of 316L stainless steel surface. The XPS results showed that part of glycine complex would be attached on the surface of 316L stainless steel to produce corrosion inhibition.