方膜上横向压阻压力传感器的非线性研究

本文对方膜的硅压力传感器结构进行了应力非线性的计算分析,得出了应力-压力关系非线性与压力量程、膜的几何参数以及器件位置的关系,并给出了实现线性最佳化设计的结果.实验与理论结果的比较表明:(1)压阻效应非线性很小,压力传感器的非线性主要决定于应力非线性;(2)方膜边缘的四端力敏电阻设计不仅灵敏度高,而且有较好的线性;(3)进一步改进压力传感器精度的方法是选用应力线性优良的结构.

Study on the Nonlinearity of Piezoresistaace Pressure Sensor Using Four-terminal Element on a Square Diaphragm

The nonlinearity of pressure to stress conversion has been analysed for square diaphragm structure. The dependences of stress-pressure nonlinearity on pressure range, geometrical parameters of diaphragm and position of sensing element are obtained. Also given is the condition of optimum linear design. The comparison experiments with the theoretical results shows that,(1) the nonlinearity of piezoresistance effects is very small and the nonli-n earity of pressure sensor is decided mainly by the nonlinearity of stress.(2) the design of four-terminal element on the edge of diaphragm shows its highest sensitivity and good linearity. (3) the way to improve the accuracy of pressure sensor is to choose the structure with good stress linearity.