| 氦离子化色谱仪在电子气体(硅烷)分析中的应用 |
| |
| 引用本文： | 方华,陈鹰,庄鸿涛,杨康,黄小强,李建浩. 氦离子化色谱仪在电子气体(硅烷)分析中的应用[J]. 低温与特气, 2009, 27(5): 39-42. DOI: 10.3969/j.issn.1007-7804.2009.05.0010 |
| |
| 作者姓名： | 方华 陈鹰 庄鸿涛 杨康 黄小强 李建浩 |
| |
| 作者单位： | 上海华爱色谱分析技术有限公司,上海,200437;上海市计量测试技术研究院,上海,201203 |
| |
| 摘 要： | 永久性气体杂质的检测一直以来是硅烷分析的难点。在此讨论GC-9560-HG电子气体专用氦离子化色谱仪分析硅烷的方法,包括取样方法、样品后处理、色谱柱切割与反吹、进样阀吹扫、自动控制、数据处理等。
|
| 关 键 词： | 气相色谱仪 硅烷 取样与尾气处理 氦离子化色谱法 |
Application of Helium Ionization Chromatograph in Electric Gas(Silane)Analysis |
| |
| Affiliation: | FANG Hua ,CHEN Ying ,ZHUANG Hong-tao ,YANG Kang ,HUANG Xiao-qiang ,LI Jian-hao ( 1. Shanghai Huaai Chromatography Analysis Co. , Ltd. , Shanghai 200437, China; 2. Shanghai Institute of Measurement and Testing Technology, Shanghai 201203, China) |
| |
| Abstract: | The determination of the gaseous impurities has been the obstacle for analyzing silane. A new method was developed for analyzing silane in electric gas using a special helium ionization chromatograph. The sampling method, sample post-treatment, column switching-backflushing technique, value flush, automatic control and data treatment were all introduced in this paper. |
| |
| Keywords: | gas chromatograph silane sampling and tail gas treatment helium ionization chromatograph |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
|
