钛扩散LiNbO_3晶体光波导长周期光栅

设计了一种钛扩散铌酸锂(LiNbO_3)晶体光波导结构,并在该基础上制作了长周期光栅.使用两步钛扩散方法在Z切LiNbO_3基片上制造了波导,它包括一个单模芯层和一个平面包层,之后用光刻胶光栅置于波导表面.实验证明用这种结构设计长周期波导光栅是可行的.对光波导制造工艺和波导结构的深入研究,为制作高速电光调制型光栅提供技术基础.

Long-period gratings based on Ti-diffused lithium niobate waveguides

A kind of Ti-diffused lithium niobate(LiNbO_3) single-mode waveguide for the realization of long-pe-riod gratings was proposed, which consists of a channel core embedded in a thin slab cladding. The waveguide was fabricated on a z-cut LiNbO_3 substrate with a two-step Ti-diffusion process and its suitability was demon-strated for grating application with a number of removable photoresist long-period gratings deposited on the waveguide surface. The waveguide fabrication process and the LiNbO_3 waveguide structure could be further explored for the development of electrooptic gratings for high-speed applications.