Gas-Sensing Properties of Spinodally Decomposed (Ti,Sn)O2 Thin Films |
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| Authors: | Shuichi Arakawa Kenji Mogi Ko-ichi Kikuta Toshinobu Yogo Shin-ichi Hirano Yoji Seki |
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| Affiliation: | Department of Applied Chemistry, School of Engineering, Nagoya University, Nagoya 464–8603, Japan;Kyocera Central Research Laboratory, Kagoshima 899–4312, Japan |
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| Abstract: | The gas-sensing properties of spinodally decomposed (Ti,Sn)O2 thin films on sapphire substrates were investigated for CO, C3H8, and C2H5OH, and hydrogen gases at a temperature of 500°C. The variation in the d -spacing of the (101) plane of (Ti0.5Sn0.5)O2 films showed behavior that was typical of spinodal decomposition during annealing at a temperature of 900°C. Transmission electron micrographs of the spinodally decomposed (Ti,Sn)O2 films on sapphire (0112) substrates revealed the characteristic modulated structure. The modulated lamella microstructure consisted of TiO2- and SnO2-rich regions at intervals of ∼10 nm. The films were very sensitive to hydrogen gas and revealed anisotropic electrical conduction that was influenced by the modulated microstructure, which is characteristic of spinodal decomposition. |
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