|
|||||
|
|
| 双坐标激光位置测量系统的研制 | |
| 引用本文： | 谢大纲,ZHANG Fei-hu,张飞虎,袁哲俊,栾殿荣,于海波.双坐标激光位置测量系统的研制[J].哈尔滨工业大学学报,2000,32(3):67-70. |
| 作者姓名： | 谢大纲 ZHANG Fei-hu 张飞虎 袁哲俊 栾殿荣 于海波 |
| 作者单位： | 1. 哈尔滨工业大学机械工程系，黑龙江 哈尔滨 150001 2. Dept. of Mechanical Engineering, Harbin Institute of Technology, Harbin 150001, China 3. 黑龙江省交通高等专科学校，黑龙江 哈尔滨 150001 |
| 摘 要： | 介绍了一套为亚微米级超精密金刚石车床在线测量而研制的双坐标频激光干涉位置测量系统。在此测量系统中以双频激光干涉测量仪作为测长仪器。本测量系统中还包含了数据采集系统、快速数据通讯系统和空气参数误差补偿系统，为提高该激光测量系统的精度还采用了激光的稳频措施，由于该测量系统具有很高的测量精度和较高的测量频响，它完全能满足所研制的亚微米级超微密金刚石在线位置测量的要求。 |
| 关 键 词： | 激光干涉测量系统 测量精度 误差补偿 车床 |
| 文章编号： | 0367-6234(2000)03-0067-04 |
| 修稿时间： | 1998年10月21 |
Devdopment of a new 2-axis laser position measuring system |
|
| ZHANG Fei-hu.Devdopment of a new 2-axis laser position measuring system[J].Journal of Harbin Institute of Technology,2000,32(3):67-70. | |
| Authors: | ZHANG Fei-hu |
| Abstract: | Presents a new two axis double frequency laser interferometric measuring system developed for on line position measurement on an ultra precision diamond turning machine, in which a double frequency interferometric measuring instrument is used for distance measurement, a data collecting system, a high speed data communicating system, and an air parameters error compensating system are included. In order to achieve high measurement accuracy a frequency stabilizing device is used. Because of high accuracy and high dynamic response, this 2 axis laser measuring system guarrantees the required measuring accuracy for an ultra precision diamond turning machine. |
| Keywords: | laser interferometric measuring system measuring accuracy error compensation ultra precision diamond turning machine |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ | |