FIB-SEM-Ar“三束”显微镜 |
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引用本文: | 刘同娟.FIB-SEM-Ar“三束”显微镜[J].电子工业专用设备,2008,37(10). |
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作者姓名: | 刘同娟 |
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作者单位: | 北京物资学院,北京101149 |
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摘 要: | FIB-SEM-Ar"三束"显微镜在FIB/SEM装置的平台上附加了降低样品损伤的低能Ar离子枪,首次实现了通过一台仪器完成高质量的透射电子显微镜TEM的样品制备。简化了样品整个加工的过程,同时大大提高了加工精度和工作效率。对"三束"显微镜做了介绍。
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关 键 词: | 三束 聚焦离子束 投射电子显微镜 Ar离子束 |
The three beam technology in IC manufacturers |
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Abstract: | FIB-SEM-Ar triple beam microscope was developed based on a completely new concept: the integration of a newly developed Ar ion beam column with a double-beam system eauipped with a focused ion beam and scanning electron microscope,resulting in the world’s first triple beam system that enables high-quality TEM sample preparation with a single system. This new system drastically improves TEM sample preparation accuracy and working efficiency.This article has made the introduction triple beam microscope. |
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Keywords: | Triple Beam FIB TEM Ar Ion Beam |
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