FIB-SEM-Ar“三束”显微镜

FIB-SEM-Ar"三束"显微镜在FIB/SEM装置的平台上附加了降低样品损伤的低能Ar离子枪,首次实现了通过一台仪器完成高质量的透射电子显微镜TEM的样品制备。简化了样品整个加工的过程,同时大大提高了加工精度和工作效率。对"三束"显微镜做了介绍。

The three beam technology in IC manufacturers

FIB-SEM-Ar triple beam microscope was developed based on a completely new concept: the integration of a newly developed Ar ion beam column with a double-beam system eauipped with a focused ion beam and scanning electron microscope,resulting in the world’s first triple beam system that enables high-quality TEM sample preparation with a single system. This new system drastically improves TEM sample preparation accuracy and working efficiency.This article has made the introduction triple beam microscope.