微纳三坐标测量机平移台有限元分析及优化

微纳三坐标测量机定位平移台的机械变形对精度影响较大,故在机械设计时须对其进行分析处理。通过有限元分析软件ANSYS对微纳三维平移台不同轴系及不同状态进行了一系列的建模和分析,分析结论包括:Z轴系统重力引起的X、Y轴定位平移台在运动中结构变形过大,对此提出添加力平衡系统的方案以平衡Z轴系统重力;通过适当增加X、Y轴平移台厚度及添加加强筋的方法能减小自重变形以满足机械设计精度。

Analysis and Optimization of Micro-nano 3D CMM' s Positioning Platform

The mechanical deformation of the micro-nano 3D CMM＇ s positioning platform has a greatly influence up-on the measurement accuracy of the machine, therefore in the design need to add some analysis. Different axes and states of the micro-nano 3D positioning platform were modeled and analyzed by the finite element analysis software ANSYS. Anal-ysis conclusions include ： during the moving of X and Y axis platforms , the gravity system of Z axis cause an exaggeratedly structural distortion, so a force balance system was added; for meeting the design mechanical accuracy, increasing the thickness of X and Y axis olatforms orooerlv and addinz reinforeinz ribs reduce their own gravitv deformation.