微纳尺度操作的系统设计

微纳尺度操作是当前先进制造技术领域的一个重要发展方向。为了实现在亚微米及纳米尺度下进行实时观测下的操纵，设计了一种基于SEM的微纳操作系统，本系统由数字式环境扫描电子显微镜系统、精密工件台、微纳操作机构和计算机系统组成，采用数字式环境扫描电子显微镜作为微纳操作的观测器，在SEM的样本室内安装微纳操作臂，计算机系统控制微纳操作臂，使其在SEM的实时观测下对放置在精密工件台上的样本进行操纵。实验结果证明本系统能够适于在各种环境下进行微纳尺度操作，具有很强的实用性。

Micro-Nano Scale Manipulation System Design

Micro-nano manipulation is the main trend in modem advanced manufacturing technology. In order to implement operation on the submicron- and nano-scale under real-timely observation, a micro-nano manipulating system based on SEM is presented. This system consists of digital environment scanning electron microscope, precision stage, micro-nano manipulator and computer system. Wherein digital environment scanning electron microscope was used as the monitor for micro-nano manipulation. A micro-nano manipulator was placed in the SEM specimen cabinet, computer system actuated the micro-nano manipulator and enabled it to handle the specimen placed on the precision stage under the SEM real-timely observation, and also actuate the pattern generator to execute electron beam lithography for fabricate micro-nano structures. The experimental results have proved that this system is suitable to micro-nano manipulation in various environments, and it is useful and efficient.