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| SEM自动聚焦系统设计 | |
| 引用本文： | 段守胜,李勇滔,谢家仪,方光荣.SEM自动聚焦系统设计[J].现代科学仪器,2009(4):21-24. |
| 作者姓名： | 段守胜 李勇滔 谢家仪 方光荣 |
| 作者单位： | 1. 中国科学院电工研究所,北京,100190;中国科学院研究生院,北京,100059 2. 国家纳米科学中心,北京,100190 3. 中国科学院电工研究所,北京,100190 |
| 摘 要： | 扫描电子显微镜（SEM）是用于观测微观世界的工具。扫描图像系统的聚焦好坏直接影响了观测的结果。反复的人为操作不仅使操作者疲惫，更会带来主观的误差。本系统依靠FEI公司提供的接口函数（API）采集样品的图像，利用DCT变换对图像进行频域性质分析，设计出图像清晰度评价函数，并且使用爬山算法搜索出最佳聚焦物镜电流，成功设计出高精度、鲁棒性高的自动调焦软件，实现了调焦的自动化。 |
| 关 键 词： | SEM 自动聚焦 DCT变换 爬山算法 |
Design of SEM Autofocus System |
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| Duan Shousheng,Li Yongtao,Xie Jiayi,Fang Guangrong.Design of SEM Autofocus System[J].Modern Scientific Instruments,2009(4):21-24. | |
| Authors: | Duan Shousheng Li Yongtao Xie Jiayi Fang Guangrong |
| Affiliation: | Duan Shousheng ,Li Yongtao ,Xie Jiayi ,Fang Guangrong (1Institute of Electrical Engineering, Chinese Academy of Sciences, Beijing 100190, China;ZGraduate School of Chinese Academy of Sciences, Beijing 100039, China;3 National Center for Nanoscience and Technology, Beijing 100190, China) |
| Abstract: | Scanning Electron Microscope （SEM） is a tool in observing the micro world. The focusing quality of scanning-image system directly influences the result of observation. Repeated operation makes the operator exhausted, thus brings the subjective error. This system, which used API function provided by FEI Company gets the sample images, analyses the frequency-domain characteristics through DCT method and designs an evaluation function to estimate definition of the images. Furthermore, the system can obtain the optimal current of object lens by the Hill Climbing Algorithm. This paper presents a successful design of auto-focus software with high accuracy and robust, which made the focus system automated. |
| Keywords: | SEM Auto-focus DCT Hill Climbing Algorithm |
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