微型压电陶瓷棒角速率陀螺设计

研制了基于微型压电陶瓷棒结构代替双敏感梁结构及压电陶瓷片的微型角速率陀螺,并设计了相敏检波电路。首先采用易于加工成高精度的微型陶瓷棒作为敏感体,在其上印刷成六个带状电极并予以极化构成三副电极对,然后设计了封装及相敏检波电路,从而有效地减小了敏感结构的尺寸,提高了其加工精度,实现了角速率陀螺微型化。标定结果表明,该角速率陀螺线性度好,相关系数为0.9996;精度高,标准误差为0.0036。

Design of micro piezoelectric ceramic rod angular rate gyro

This paper developed a micro angular rate gyro based on micro piezoelectric ceramic rod structure instead of the sensitive double-deck structure as well as piezoelectric ceramic strain foils, and designed a phase-sensitive detection circuit. By taking the miniature ceramic rod which is easily to machine high accuracy as sensitive structure, and by printing and polarizing six belt-shaped electrodes above it to constitute three pairs of electrodes, this paper designed package and the phase-sensitive detection circuit in the system so that it effectively reduced the sensitive structure size and improved its processing precision to realize the angular rate gyro microminiaturization. Calibration results indicate that this angular rate gyro has good linearity with correlation coefficient of 0. 9996, and high precision with standard error of 0.0036.