两种微纳米硬度测试方法的比较

在对材料微纳米硬度测试中,可利用纳米压痕方法得到载荷-位移曲线,并用相关算法得到接触面积和硬度值;也可通过原子力显微镜测出压痕残余面积,由残余面积和最大载荷得到材料的硬度值.利用这两种方法对塑性材料单晶铝和脆性材料单晶硅做微纳米硬度测试试验,经过比较分析,这两种方法各有优势和不足,得到的材料微纳米硬度都有压痕尺寸效应,但第二种方法得到的微纳米硬度尺寸效应比第一种明显.

The Compare between Two Micro-Nanohardness Testing Methods

In the micro-nanohardness testing methods of materials,nanoindentation method can obtain load-displacement curves,and some related algorithms based on these curves can determine the contact area and hardness.In another method,residual area of indentation can be obtained by atomic force microscope(AFM),and hardness is determined by residual area and peak load.The micro-nanohardness experiments are completed on the plastical material-single crystal aluminum and the brittle material-single crystal silicon by both methods.Through comparison and analysis,the two methods have advantages and disadvantages respectively.The hardness values obtained by the two methods all have indentation size effect(ISE),but the ISE of second method is more obvious than that of the first.