浸渍阴极的真空预处理技术

本文总结了用于真空微波电子器件的浸渍阴极的蒸发规律,通过分析提出了浸渍阴极预处理工艺,建立了超高真空装置.在超高真空环境下,将浸渍阴极灯丝加热,使阴极温度升高到1100～1200℃,保持1～200h(温度和时间依不同微波管型而定).预处理工艺解决了浸渍阴极发射与蒸发的矛盾,现已建立数十台、几十个工位的浸渍阴极预处理设备...

Pretreatment of the Impregnated Cathode

The evaporation law of impregnated cathode for microwave vacuum electronic devices is summarized,and a pretreatment method of impregnated cathode is proposed.In the ultra-high vacuum,the cathode in the electron gun is heated.When the temperature rises to 1100~1200℃,and maintains for 1~200 h(the temperature and time depend on different microwave tubes).This technology solves the contradiction between cathode emission and evaporation in the electron gun.More than a dozen impregnated cathode pretreatment equipments have been developed,which improves the insulation performance of the electron gun in microwave vacuum electronic devices and reduces the grid emission.At the same time,this technology can speed up the inspection of the reliability of the protons,thereby avoiding the problem of thermon disconnection caused by the defects of the heaters during the use of microwave devices,and improving the reliability of the heater in microwave vacuum electronic devices.