Microfabrication of freedom and articulated alumina-based components

 In order to obtain three dimensional micro-objects, we developed a new microstereolithography apparatus based on the use of a dynamic mask generator which allows the manufacture of a complete layer by only one irradiation, the part being still layered. In order to improve the mechanical properties of the fabricated micro-objects and the resolution of the process, a mixture of alumina and photopolymer is used. By controlling the fabrication parameters, we present a movable microgimbal which has been realised in only one fabrication step. Received: 5 October 2001/Accepted: 26 November 2001