Materials issues in microelectromechanical systems (MEMS) |
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| Affiliation: | 1. School of Instrument Science and Opto-electronics Engineering, Beihang University, Beijing 100191, China;2. Science and Technology on Inertial Laboratory, Beihang University, Beijing 100191, China;3. Department of Mechanical and Aerospace Engineering, University of Missouri MO 65211, USA;1. CSIR-Indian Institute of Petroleum, Mohkampur, Dehardun 248005, India;2. Academy of Scientific and Innovative Research, New Delhi 110025, India;3. Department of Materials Science and Engineering, Kyoto University, Kyoto 606-8501, Japan;1. Department of Electronics and Communication Engineering, Saveetha Engineering College, Thandalam, Chennai 602 105, Tamilnadu, India;2. Department of Electrical and Electronics Engineering, Saveetha School of Engineering, Saveetha Institute of Medical and Technical Sciences, Saveetha University, Chennai 602105, India;3. Department of Electrical and Electronics Engineering, Chaitanya Bharathi Institute of Technology, Hyderabad 500075, India;4. McMaster University, Canada |
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| Abstract: | Microelectromechanical systems (MEMS) have recently become an important area of technology, building on the success of the microelectronics industry over the past 50 years. MEMS combine mechanical and electrical function in devices at very small scales. Examples include pressure sensors, accelerometers, gyroscopes and optical devices, as well as chemical, biomedical and fluidic applications. The status of MEMS technology is reviewed with particular emphasis on materials issues therein. The materials issues in MEMS are divided into three categories, the MEMS material set, microfabrication processes, and material characterization and design. Each of these areas is addressed, with particular emphasis on the potential impact of materials solutions. A discussion of the future of MEMS and the role of materials in that future is given. |
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