用高分辨率快速成形系统制作细微结构

针对制作参数对制作分辨率的影响，利用高分辨率激光快速成形系统进行了试验研究。研究表明，制作时激光功率与光束扫描速度的比值越小，则制作的单壁结构厚度越小。采用准确的线宽补偿、较小的激光功率及具有较高临界曝光量的光敏树脂，可制作出具有较小槽宽尺寸的细微槽状结构。制作出了壁厚为0.011 mm的单壁结构及槽宽为0.034 mm的槽状结构。试验结果表明，该快速成形系统有很高的制作分辨率，具有制作扫描平面内细微结构的能力。

FABRICATION OF MICROSTRUCTURES USING HIGH-RESOLUTION STEREOLITHOGRAPHY SYSTEM

In order to build complex 3D microstructures, experimental studies are carried out to investigate the influence of the build parameters on the fabrication resolution using high-resolution stereolothography system. It is found that the less the ratio of laser power to scanning velocity, the thinner the vertical wall. It is also found that grooves with small width can be created with cured line width accurately compensated, lower laser power adopted and photopolymer having the higher critical exposure used in the SL process. As a result, components having vertical wall with the thickness of 0.011 mm and slot with the width of 0.034 mm are successfully fabricated. The experimental result demonstrates that the resolution of the novel stereolithography system is higher than that of the ordinary SL system, and the novel SL system has the ability to fabricate microstructures in scanning plan plane.