Affiliation: | (1) Manufacturing System Research Center/Nano Machining Team, Korea Institute of Industrial Technology (KITECH), 35-3, HongChon-Ri. IbJang-Myun, 330-825 Chon-An., Chungnam, Korea;(2) Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology (KAIST), 305-701 Teajon, Korea |