基于电子散斑干涉技术的直线度误差测量方法

将散斑干涉与CCD图像处理技术相结合，提出了一种测量空间直线度误差的新方法，该方法利用待测工件的直线度误差使毛玻璃移动微小位移，通过散斑条纹的变化求出位移变动量。由导出的直线度误差与位移的关系，对工件的直线度误差进行了测量，测量结果为7．420μm。实验结果表明，此种方法测量精确度高，具有一定的使用价值。

Method of measuring alignment error based on ESPI

With the combination of the speckle interferometry and the CCD image- processing technique, a new method is presented to measure the spatial alignment error. A micro - displacement of the frosted glass caused by test workpiece alignment error is calculated by considering speckle fringe pattern change, The relation between the alignment error and the displacement is educed and used to measure the object＇ s alignment error. The result is 7.42tan. Experiments show the new method has high accuracy and some values in practice.