Effects of incidence angles of ions on the mass resolution of an energy compensated 3D atom probe |
| |
| Authors: | Bémont E Bostel A Bouet M Da Costa G Chambreland S Deconihout B Hono K |
| |
| Affiliation: | Groupe de Physique des Matériaux, UMR CNRS 6634, Université et INSA de Rouen 76821 Cedex, Mont Saint Aignan, France. emilie.bemont@univ-rouen.fr |
| |
| Abstract: | We have used a first-order reflectron lens in an optical tomographic atom probe in order to improve the mass resolution. Calculations have been performed to determine the effect of second-order errors in ion energy and incidence angle on the performance of the lens. By applying a correction procedure based on the results of these calculations, we have been able to improve experimental mass resolution by 30%. |
| |
| Keywords: | |
| 本文献已被 PubMed 等数据库收录！ |
|
