电可调非致冷红外探测原理

传统的红外光谱成像技术能够提供丰富的光谱信息，应用广泛，但该技术同时也存在一定局限性，如很难同步实现探测器小型化和探测波段实时调节等方面的要求。本文提出了一种基于电可调表面等离子体谐振吸收的新型红外探测器结构。基于电磁场理论分析了结构参数对红外光学吸收的影响,并通过结构参数的优化使吸收结构对特定红外波段的吸收率达到90%以上。分析了不同栅压下,VOx热敏层中载流子的浓度分布和折射率变化情况,结果显示这种器件具有显著的电可调红外光谱吸收特性。本文研究在非制冷微测辐射热计探测器上使用电可调功能，使之具有片上可调光谱探测能力，同时易于阵列化，为微小型可配置光谱成像探测器件提供了一条思路。

Investigation of electrically tunable uncooled infrared detector

Traditional infrared spectral imaging technology which is widely used can provide a wealth of spectral information, but there are some limitations in this technology as well, such as difficult to achieve detector miniaturization and requirements of real-time adjustment in detection wavelength at the same time.This paper proposes a new infrared detector structure which is based on the electrically tunable surface plasmon resonance absorption .We do an analysis of how the structural parameters effect on the infrared optical absorption with the electromagnetic theory, and make the infrared absorption rate 90% or above in some particular wave band through the optimization of the absorbing structural parameters. We also analyze the concentration distribution of the carriers and the change of the refractive index in VOx heat sensitive layer under different gate pressure, the result shows that this device has a significant electrically tunable infrared spectral absorption characteristics.This paper tries to use electrically tunable function in uncooled micro-bolometer detector, so that it will have a on-chip tunable spectral detection capability, while easy to integrate in an array, this provides a new idea for micro-configurable spectral imaging detector.