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| MEVVA离子源制备Fe/Si系薄膜的颗粒污染问题 | |
| 引用本文： | 胡冰,李晓娜,王秀敏,董闯.MEVVA离子源制备Fe/Si系薄膜的颗粒污染问题[J].真空,2006,43(3):21-24. |
| 作者姓名： | 胡冰 李晓娜 王秀敏 董闯 |
| 作者单位： | 1. 大连理工大学三束国家重点实验室,辽宁,大连,116024;大连理工大学材料工程系,辽宁,大连,116024 2. 大连理工大学三束国家重点实验室,辽宁,大连,116024 3. 大连理工大学材料工程系,辽宁,大连,116024 |
| 摘 要： | 研究了MEVVA离子注入机在Fe／Si系薄膜制备过程中产生的颗粒污染问题以及颗粒污染对薄膜质量带来的影响。选取不同制备条件下的Fe／Si薄膜，采用电子探针、透射电镜等分析手段对颗粒污染给Fe／Si薄膜所造成的影响进行了详细的分析和讨论。分析结果表明，MEVVA源离子注入机产生的颗粒污染主要包括Fe、Al、C、O等几种元素，这其中Fe和Al元素的污染较为严重。不同注入时期引入的颗粒对Fe／Si系薄膜的质量会产生不同程度的影响，针对不同的影响可以找到一些解决方法来克服薄膜质量下降的问题。 |
| 关 键 词： | 颗粒污染 MEVVA源 离子注入 Fe/Si薄膜 |
| 文章编号： | 1002-0322（2006）03-0021-04 |
| 收稿时间： | 2005-09-30 |
| 修稿时间： | 2005-09-30 |
Particulate contamination of Fe/Si Thin film when prepared with MEVVA ion Source |
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| HU Bing,LI Xiao-Na,WANG Xiu-min,DONG Chuang.Particulate contamination of Fe/Si Thin film when prepared with MEVVA ion Source[J].Vacuum,2006,43(3):21-24. | |
| Authors: | HU Bing LI Xiao-Na WANG Xiu-min DONG Chuang |
| Affiliation: | 1. State key laboratory of materials modification, Dalian 116024, China ; 2. Department of materials Engineering in Dalian University of Technology, Dalian 116024 ,China |
| Abstract: | The formation process of particulate contamination and its influence on the quality of Fe/Si thin film prepared with MEVVA iron source were investigated by using Electron Probe Microanalysis(EPMA) and transmission electron microspcopy(TEM).It was found that the particles formed are composed of different elements,such as iron,aluminum,carbon and oxygen,where iron and aluminum are major.Moreover,the influence of particulate contamination on the quality of Fe/Si film changes with different ion-implanting phases in the whole preparation process.Some solutions were proposed correspondingly to the quality problems caused by particulate contamination. |
| Keywords: | particulate contamination MEVVA ion source ion implantion Fe/Si thin film |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ | |