无驱动硅微机械陀螺

报道了无驱动结构硅微机械陀螺,推导了输出电压方程。从方程表达式可看出,该陀螺输出信号包含旋转载体的偏航和俯仰角速度及自旋角速度的信息。通过实验说明如何在输出信号中提取相关信息,即输出信号的频率表示载体自旋角速度的平均值,输出信号的包络表示载体偏航和俯仰角速度大小的瞬时值,输出信号的极性由输出波形的相位超前和滞后确定。最后给出该陀螺目前所达到的主要性能指标。

Non-driven Silicon Micro-mechanical Gyroscope

The paper reports a non-driven silicon micro-mechanical gyroscope and deduces the equation of the output voltage.According to the expression of the equation,the output signal of the gyroscope contains the information of the yawing or pitching and rolling angular velocity of the rotating carrier.The experiments show how to get the useful information,i.e.the frequency of the output signal represents the average value of the rolling angular velocity,and the envelope of the output signal indicates the instantaneous value of the quantity of the yawing or pitching angular velocity,and the phase difference between the output signal and the accelerator meter shows the instantaneous value of the direction of the yawing or pitching angular velocity.Finally,the main performance of the gyroscope is obtained.