| 常压烧结制备氧化钨陶瓷靶材的致密化研究 |
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| 引用本文： | 尚福亮,张忠健,杨海涛.常压烧结制备氧化钨陶瓷靶材的致密化研究[J].陶瓷学报,2012,33(1):31-35. |
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| 作者姓名： | 尚福亮 张忠健 杨海涛 |
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| 作者单位： | 1. 深圳大学材料学院,深圳市特种功能材料重点实验室,广东深圳518060
2. 株洲硬质合金集团有限公司,湖南株洲,412000 |
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| 基金项目： | 深圳市科技研发资金基础研究计划 |
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| 摘 要： | 采用常压固相烧结工艺,制备出高纯度、高致密度的氧化钨靶材。考察了粉体粒度、成型压强、烧结温度和保温时间等对靶材致密度的影响。测试结果表明,以粒度0.27μm的粉体为原料,成型压强为60MPa,烧结温度为1200℃,保温时间为1h的条件下,可以制备出高致密度的氧化钨靶材,其组成为高纯的单斜晶相。
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| 关 键 词： | 靶材 WO3 常压烧结 致密 |
Densification of WO3 Ceramic Target Prepared by Pressureless Sintering |
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| SHANG Fuliang
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ZHANG Zhongjian
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YANG Haitao.Densification of WO3 Ceramic Target Prepared by Pressureless Sintering[J].Journal of Ceramics,2012,33(1):31-35. |
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| Authors: | SHANG Fuliang ZHANG Zhongjian YANG Haitao |
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| Affiliation: | 1(1.Shenzhen Key Laboratory of Special Functional Materials and College of Materials Science & Engineering,Shenzhen University,Shenzhen Guangdong 518060,China;2.Zhuzhou Cemented Carbide Group Co.,Ltd., Zhuzhou Hunan 412000,China) |
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| Abstract: | The WO3 ceramic targets with high purity and high density were prepared by pressureless sintering.The effects of powder size,molding pressure,sintering temperature and soaking time on the density of the target were studied.The results show WO3 ceramic target with high purity and high density can be prepared as the powder size is 0.27μm,the molding pressure is 60Mpa,the sintering temperature is 1200℃ and the soaking time is 1h.The WO3 target has a single monoclinic phase. |
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| Keywords: | target WO3 pressureless sintering densification |
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