Comparative Analysis of Scanning Electron Microscopy Techniques for Semiconductors: Electron-Beam-Induced Potential Method,Single-Contact Electron-Beam-Induced Current Method,and Thermoacoustic Detection |
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| Authors: | Rau E. I. Gostev A. V. Shiqiu Zhu Phang D. Chan D. Thong D. Wong W. |
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| Affiliation: | (1) Institute of Microelectronic Technology and Ultrahigh-Purity Materials, Russian Academy of Sciences, Chernogolovka, Moscow oblast, 142432, Russia;(2) National University of Singapore, Singapore |
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| Abstract: | The potentialities of three techniques for detecting signals from barrier structures in a scanning electron microscope are discussed. All the methods are virtually contactless; that is, it is only required that the chips are grounded. The relaxation behavior of the signals is considered. The invalidity of the thermoacoustic detection technique is shown. It is experimentally demonstrated that information extracted with the method of electron-beam-induced surface potential is identical to that obtained by thermoacoustic detection. |
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