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Synthesis and properties of Cr-Al-Si-N films deposited by hybrid coating system with high power impulse magnetron sputtering (HIPIMS) and DC pulse sputtering
Authors:Min Su KANG  Tie-gang WANG  Jung Ho SHIN  Roman NOWAK  Kwang Ho KIM  .
Affiliation:School of Materials Science and Engineering,Pusan National University,Busan 609-735,Korea;2.State Key Laboratory of Corrosion and Protection,Institute of Metal Research,Chinese Academy of Sciences,Shenyang 110016,China;3.National Core Research Center for Hybrid Materials Solution,Pusan National University,Busan 609-735,Korea;4.Extreme Energy-Density Research Institute,Nagaoka University of Technology,Nagaoka,Niigata 940-2188,Japan;5.School of Chemical Technology,Aalto University,Aalto 00076,Finland;
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