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溶胶-电雾化系统雾滴速度场LDV测量的研究
引用本文:鲁健,褚家如,秦俊.溶胶-电雾化系统雾滴速度场LDV测量的研究[J].微细加工技术,2004(3):24-28.
作者姓名:鲁健  褚家如  秦俊
作者单位:1. 中国科学技术大学,精密机械与精密仪器系,合肥,230027
2. 中国科学技术大学,火灾科学国家重点实验室,合肥,230027
基金项目:中国科学院博士点基金资助项目(20030358018)
摘    要:用基于多普勒频移和相位差原理的LDV(Laser Doppler Velocimeter)技术研究了溶胶一电雾化系统中荷电雾滴的轴向速度及其分布,并分析了雾滴在输运过程中的受力情况。结果表明,在电场力、重力、流体拖曳力等共同作用下,雾滴轴向速度在垂直于雾场轴线的平面内沿远离轴线的方向逐渐降低,但各点速度分布的标准偏差趋于减小;随着轴向距离的增加,雾滴速度明显增大,在距喷头5cm处高达1.2m/s,并沿径向分布趋于一致。这些结果为溶胶一电雾化系统中薄膜沉积过程的理论研究提供了实验依据。

关 键 词:雾滴速度  LDV系统  溶胶-电雾化  PZT铁电薄膜  微机电系统
文章编号:1003-8213(2004)03-0024-05
修稿时间:2004年4月20日

Research on Droplets' Velocity in Electrostatic Spray Deposition System by LDV
LU Jian,CHU Jia-ru,QIN Jun.Research on Droplets'''' Velocity in Electrostatic Spray Deposition System by LDV[J].Microfabrication Technology,2004(3):24-28.
Authors:LU Jian  CHU Jia-ru  QIN Jun
Affiliation:LU Jian~1,CHU Jia-ru~1,QIN Jun~2
Abstract:A laser Doppler velocimeter(LDV)was used to measure the droplets'axial velocity and its distribution induced by electrostatic spray and the forces acting on the droplets in their transportation are analyzed. The results show that under the effects of the electric field force F_e,gravity and fluid dragging force etc.,the droplets exhibit higher axial velocity and more uniformly velocity distribution in radial direction with the increase of the transported distance. It was also found that outer droplets move slower but exhibit more narrow velocity distribution than inner ones. These experimental results are valuable for numerical analysis on interactions between droplets and substrate during PZT film preparation in electrostatic spray deposition (ESD) system.
Keywords:droplet's velocity  LDV  ESD  PZT film  MEMS
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