| PECVD淀积工艺及室温NO_x气体传感器 |
| |
| 引用本文： | 廖清华,江风益,戴国瑞. PECVD淀积工艺及室温NO_x气体传感器[J]. 南昌大学学报(工科版), 1992, 0(3) |
| |
| 作者姓名： | 廖清华 江风益 戴国瑞 |
| |
| 作者单位： | 江西工业大学(廖清华，江风益)，吉林大学(戴国瑞) |
| |
| 摘 要： | 本文介绍了用PECVD技术淀积NO_x敏感的工艺,并对典型工艺参数条件进行了讨论。我们淀积的这种NO_x敏感膜,不仅在旁热情况下对NO_x敏感,而且在室温条件下也能对NO_x气体敏感。最后,我们对室温NO_x气体传感器的一些重要性能指标进行了研究。
|
| 关 键 词： | PECVD 薄膜 传感器 |
PECVD Technique and Room-temperature NO_x Gas Sensor |
| |
| Liao Qinghua Jiang Fengyi. PECVD Technique and Room-temperature NO_x Gas Sensor[J]. Journal of Nanchang University(Engineering & Technology Edition), 1992, 0(3) |
| |
| Authors: | Liao Qinghua Jiang Fengyi |
| |
| Affiliation: | Liao Qinghua Jiang Fengyi (Jiangxi Polytechnic University)Dai Guorui (Jilin University) |
| |
| Abstract: | The NO_xsensitive thin-film grown by PECVD technique is introduced in this paper, The correlations between the properties of the thin films and their tipical deposition conditions have been investigated. The thin-film is not only sensitive to NO_xgases during heating, but also sensitive to NO_xgases in room-temperature. Finally, we determinated the eharaeteristes of the time reponse and restoring for NO_xgas sensors in room temperature. |
| |
| Keywords: | PECVD Thin-film Sensors |
| 本文献已被 CNKI 等数据库收录！ |
