| 医用TiNi合金表面等离子体沉积梯度DLC膜及抗腐蚀性能 |
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| 引用本文： | 郑斌,徐军,齐民. 医用TiNi合金表面等离子体沉积梯度DLC膜及抗腐蚀性能[J]. 功能材料, 2007, 38(1): 115-118 |
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| 作者姓名： | 郑斌 徐军 齐民 |
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| 作者单位： | 大连理工大学,三束材料表面改性国家重点实验室,辽宁,大连,116024;大连理工大学,材料科学与工程学院,辽宁,大连,116024;大连理工大学,三束材料表面改性国家重点实验室,辽宁,大连,116024 |
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| 摘 要： | 采用双放电腔MW-ECR等离子体源增强磁控溅射和沉积技术,在TiNi合金表面成功地镀制了梯度DLC膜.拉曼光谱分析表明实验获得的薄膜是典型的DLC膜,其结构受梯度层工艺影响.采用原子力显微镜(AFM)观察了薄膜的表面形貌,结果显示其表面较为平整.在Troyde's模拟体液中的电化学腐蚀实验结果说明,梯度DLC膜显著地增强了TiNi合金基体的抗腐蚀能力.从示差扫描量热仪(DSC)结果看到表面改性没有明显影响TiNi合金基体的使用性能.
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| 关 键 词： | 类金刚石膜 TiNi形状记忆合金 抗腐蚀性能 |
| 文章编号： | 1001-9731(2007)01-0115-04 |
| 修稿时间： | 2006-07-18 |
Preparation of graded DLC film on TiNi SMA by plasma enhanced deposition and behavior of corrosion-resistance |
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| ZHENG Bin,XU Jun,QI Min. Preparation of graded DLC film on TiNi SMA by plasma enhanced deposition and behavior of corrosion-resistance[J]. Journal of Functional Materials, 2007, 38(1): 115-118 |
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| Authors: | ZHENG Bin XU Jun QI Min |
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| Affiliation: | 1. State Key Laboratory for Material Modification by Laser, Ion and Electron Beams, Dalian University of Technology, Dalian 116024, China 2. School of Materials Science and Engineering, Dalian University of Technology, Dalian 116024, China |
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| Abstract: | Graded diamond-like carbon(DLC) film containing interim layer was deposited successfully on TiNi alloy by microwave electron cyclotron resonant plasma enhanced magnetron sputtering(MW-ECR PEUMS).Visible Raman spectra confirm the amorphous carbon feature of the film and techniques of graded layer affect its structure.Smooth surface morphology of the films was observed by atom force microscope(AFM).The anti-corrosion performances of films were studied elementarily in Troyde's simulated bodily fluid.The results showed the anti-corrosion performance of TiNi alloy is improved by the existence of graded DLC films.Results of differential scanning calorimetry(DSC) prove the temperature of reversible martensite transformation of TiNi alloy remain invariant after surface modification. |
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| Keywords: | DLC NiTi shape memory alloy corrosion-resistance properties |
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