紫外激光双波段高反射镜的研制

通过非线性光学频率变换的方式,1 064 nm YAG激光可获得355 nm、266 nm波长的激光。在此系统中工作的反射镜必须同时满足两个波段的高反射。根据薄膜设计理论选择合适的镀膜材料,采用电子束离子辅助沉积工艺,经过参数优化和反复试验,在石英基片上制备了355 nm反射率为97.9%,266 nm反射率为96.8%的双波段反射镜,且在紫外波段355 nm的激光损伤阈值为1.76J/cm2,266 nm为1.12 J/cm2。测试结果表明,此反射镜的各项性能满足使用要求。

Research on Dual-band Laser High Reflection Mirror in Ultraviolet Band

The laser in the band of 355 nm and 266 nm can be produced by 1 064 nm YAG laser through non- linear optical frequency conversion mode. High reflection from double bands must be met by the mirror operating in the system. According to film design theory, the appropriate coating material is chosen. Based on electron beam ion assisted deposition （IAD） technology, through optimizing parameters and repeating tests, the double band mirror is manufactured on quartz substrate, the reflectivity is 97.9% at 355 nm and 96.8% at 266 nm, the laser induce dam- age threshold （LIDT） is 1.76 J/cm2 at 355 nm and 1.12 J/cm2 at 266 nm ultraviolet band. Test results show that all the characteristics of the mirror accord with operation requirements.