| 电子工业用高纯氮的生产 |
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| 引用本文： | 江楚标,薛鲁. 电子工业用高纯氮的生产[J]. 深冷技术, 2003, 0(5): 18-21 |
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| 作者姓名： | 江楚标 薛鲁 |
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| 作者单位： | 苏州市兴鲁空分设备科技发展有限公司,江苏省苏州市齐陆路7号,215131 |
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| 摘 要： | 生产电子工业用高纯氮的制氮装置 ,其要点和难点是一氧化碳和氢的清除。采用一氧化碳转换炉和特殊的冷箱内流程组织 ,可以生产纯度为 99 9999%以上的高纯氮。对制取电子工业用高纯氮制氮装置与常规制氮装置加氮终端净化器两种流程进行了比较。
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| 关 键 词： | 电子工业用高纯氮 一氧化碳 氢 清除 氮终端净化器 转换炉 技术经济分析 |
| 文章编号： | 1009-9425(2003)05-0018-04 |
| 修稿时间： | 2003-05-08 |
Production of high-purity nitrogen used for electronic industry |
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| Jiang Chu-biao,Xue Lu. Production of high-purity nitrogen used for electronic industry[J]. Cryogenic Technology, 2003, 0(5): 18-21 |
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| Authors: | Jiang Chu-biao Xue Lu |
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| Abstract: | The crucial point for the nitrogen plant producing high-purity nitrogen used for electronic industry is the removal of carbon monoxide and hydrogen.The high-purity nitrogen(99.9999%)can be produced by using CO converter and specific process system within the cold box.In addition,a comparison between two processes producing high-purity nitrogen used for electronic industry is made,i.e.the nitrogen plant using CO converter and specific cold box and the conventional nitrogen plant plus terminal purifier. |
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| Keywords: | High-purity nitrogen used for electronic industry Carbon monoxide Hydrogen Cleaning Nitrogen terminal purifier Converter Technical and economic analysis |
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