| 一种新型高精度平面度图像测量系统 |
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| 引用本文： | 于新瑞,王石刚,王洪. 一种新型高精度平面度图像测量系统[J]. 仪器仪表学报, 2002, 23(5): 488-491 |
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| 作者姓名： | 于新瑞 王石刚 王洪 |
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| 作者单位： | 上海交通大学机械工程学院,上海,200030 |
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| 摘 要： | 介绍了一种新型的基于平面等倾干涉原理的高精度平面度测量系统。系统利用等倾干涉原理，通过CCD提取干涉条纹信息，根据干涉条纹在窗口尺坐标上的位置，并联系相邻测量点干涉条纹方向以确定干涉条纹在被检测平面上的变化量N；借以得到既能反映出半波长整数倍，又能反映半波长小数倍的平面度误差。
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| 关 键 词： | 等倾干涉 平面度 窗口尺 干涉条纹跟踪 图像测量 |
| 修稿时间： | 2000-03-01 |
A New Type of High Precision Image Track Planeness Measuring System |
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| Yu Xinrui Wang Shigang Wang Hong. A New Type of High Precision Image Track Planeness Measuring System[J]. Chinese Journal of Scientific Instrument, 2002, 23(5): 488-491 |
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| Authors: | Yu Xinrui Wang Shigang Wang Hong |
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| Abstract: | This paper introduce a new type of high precision measurement system based on plane isoclinic interference theory (PUT). The system using PUT can be applied to grasp the information of the interferogram stripes and direction of the interferogram stripes and adjacent points,the variable N of the half-wavelength integer multiple,and those of the half-wavelength decimal multiple. At the same time, the system proved to be effective experimentally. |
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| Keywords: | Equal inclination interference Planeness Window ruler Fringes tracking Image measurement |
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