一种L～Ka波段的双边多触点型RF MEMS单刀六掷开关

目前通讯、导航等领域对单刀多掷开关有广泛的需求,而此类开关存在体积大、工作频带窄、插入损耗大、隔离度低等问题。文章设计了一种串联接触式双边多触点型RF MEMS单刀六掷开关。开关的下电极上设有三个圆形触点,远端连接有喇叭状过渡带,其上是带有带状孔的“X”形上电极,通过减小接触电阻和耦合电容来改善射频性能。经HFSS软件仿真优化,该开关工作频率可覆盖L～Ka波段,且在26.5 GHz下,插入损耗≤0.3 dB,隔离度≥37 dB,性能良好,尺寸为1.05×1.05×0.5 mm³。结果表明,设计的单刀六掷开关射频性能具有较大优势,同时满足小型化的要求,因此在L～Ka波段的导航、认知无线网络以及微波测试等领域具有较大的应用前景。

Design of an L to Ka-Band Double-Sided Multi-Contact RF MEMS Single Pole Six Throw Switch

At present, there is a wide demand for single-pole multi-throw switch in communication, navigation and other fields. However, this kind of switch is usually large in size, narrow in working frequency band, large in insertion loss and low in isolation. A series-contact double-sided multi-contact RF MEMS single pole six throw switch was designed to solve the above problems in this paper. Three circular contacts were placed on the lower electrode of the switch, and the distal end was connected with a horn shaped transition belt. Above it were "X" shaped upper electrodes with slot. This structure could improve RF performance greatly by reducing coupling capacitance and contact resistance. HFSS software was used to simulate and optimize the switch. Its operating frequency can cover L~Ka band. At 26.5 GHz, the insertion loss is less than or equal to 0.3 dB, and the isolation degree is more than or equal to 37 dB. In addition, its size is 1.05×1.05×0.5 mm³.The results show that the proposed single pole six throw switch has great RF performance and meets the requirements of miniaturization. Therefore, it has a large application prospect in L~Ka band navigation, cognitive radio network and microwave testing.