高性能激光诱导石墨烯压力传感器的研究

为了保证在低成本、易制备的前提下提高激光诱导石墨烯压力传感器的性能，设计了一种石墨烯压力传感器的放大结构。表征了激光诱导石墨烯压力传感器的表面结构，分析了表面多孔泡沫结构对压阻效应的影响，采用COMSOL软件对传感器放大结构的受力情况进行仿真分析，得到在外界压力下石墨烯层的受力情况。选用3D打印方法制备树脂材料放大结构基底，在低成本的同时兼顾了轻质、高精度、高机械强度等性能。测试结果表明，压强在5～20 kPa范围内时，该放大结构的灵敏度较无放大结构提高了约43%。

Study on a High Performance Laser Induced Graphene Pressure Sensor

In order to improve the performance of laser-induced graphene pressure sensors under the premise of low cost and easy preparation, an amplification structure of graphene pressure sensor was designed. The surface structure of laser-induced graphene pressure sensor was characterized, and the influence of the surface porous foam structure on the piezoresistive effect was analyzed. COMSOL software was used to simulate and analyze the stress of the sensor amplification structure, and the stress of graphene layer under external pressure was obtained. The amplification substrate was 3D printed with the resin material, which took into account the properties of light weight, high precision, and high mechanical strength at low cost. The tested results show that when the pressure is in the range of 5-20 kPa, the sensitivity of the amplified structure is increased by about 43% compared with that of the non-amplified structure.