| 激光量块干涉测量中传感器的应用和校准 |
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| 引用本文： | 蒋秀兰,葛爱明.激光量块干涉测量中传感器的应用和校准[J].上海计量测试,2007,34(3):12-14. |
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| 作者姓名： | 蒋秀兰 葛爱明 |
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| 作者单位： | 1. 上海市计量测试技术研究院
2. 复旦大学光源与照明工程系 |
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| 摘 要： | 本文介绍了双波长激光量块干涉仪中使用的温度、湿度和气压传感器,描述了其工作原理、设计方案、测量不确定度以及校准方法。这些传感器同样可用于其他高准确度长度测量的激光干涉系统中。
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| 关 键 词： | 激光干涉仪 传感器 校准 |
The application and calibration of sensors in the laser interferometer for gauge block measurement |
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| Jian Xiulan,Ge Aiming.The application and calibration of sensors in the laser interferometer for gauge block measurement[J].Shanghai Meassurement and Testing,2007,34(3):12-14. |
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| Authors: | Jian Xiulan Ge Aiming |
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| Affiliation: | 1.Shanghai Institute of Measurement and Testing Technology; 2.Fudan University |
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| Abstract: | This paper introduces the sensors of temperature ,humidity and pressure, applied in the laser interferometer for gauge block measurement with double wavelengths, describes the principle ,design, uncertainty of measurement,as well as the method of calibration. They could be also used to other laser interferometers for high-grad length measurement. |
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| Keywords: | gauge block laser interferometer sensor calibration |
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