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Investigation of the corrosion protection of SiOx-like oxide films deposited by plasma-enhanced chemical vapor deposition onto carbon steel
Authors:Amel Delimi  Yannick Coffinier  Brahim Talhi  Sabine Szunerits
Affiliation:a Institut de Recherche Interdisciplinaire (IRI, USR 3078), Parc de la Haute Borne, 50 Avenue de Halley, BP 70478, 59658 Villeneuve d’Ascq, France
b Institut d’Electronique, de Microélectronique et de Nanotechnologie (IEMN, UMR 8520), Cité Scientifique, Avenue Poincaré, BP 60069, 59652 Villeneuve d’Ascq, France
c Laboratoire de Chimie des Matériaux Inorganiques - LCMI BP 12, 23000 Annaba, Algeria
Abstract:The paper reports on the corrosion behavior of carbon steel coated with thin SiOx-like oxide films. The SiOx-like coatings were deposited by plasma-enhanced chemical vapor deposition (PECVD) and their thickness was varied between 20 and 200 nm. The coated carbon steel interfaces were investigated for their corrosion protection efficiency when immersed in an aqueous saline solution of 3% NaCl. FTIR measurements and electrochemical impedance spectroscopy (EIS) experiments revealed that thin SiOx-like coating layers (20 nm thick) do not prevent the carbon steel from corrosion, while thicker silica layers (d ≥ 100 nm) protect efficiently carbon steel interfaces in highly saline media with a protection efficiency of about 96% for a 200 nm thick coating.
Keywords:Carbon steel  Amorphous silica  PECVD  Coating  Corrosion inhibition
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