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| 外差干涉比相技术在纳米测量中的应用 | |
| 引用本文： | 侯文玫,裘惠孚. 外差干涉比相技术在纳米测量中的应用[J]. 机械工程学报, 1987, 23(4): 13-17 |
| 作者姓名： | 侯文玫 裘惠孚 |
| 作者单位： | 陕西机械学院北京研究生部 |
| 摘 要： | 利用塞曼激光和光波比相技术的结合实现了一种高精度激光外差干涉测量系统。它也可以用来直接测量空气折射率n。多次实验证实，dn/n的重复性为5×10{sup}-8。 |
| 关 键 词： | 大中型光学元件 高效精密磨削技术 磨削工艺 磨削装备 研究综述 |
THE APPLICATION OF THE HETEODYNE PHASE COMPARING INTERFERENCE IN NANO-MTEER MEASUREMENT |
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| Hou Wenmei,Qiu Huifu. THE APPLICATION OF THE HETEODYNE PHASE COMPARING INTERFERENCE IN NANO-MTEER MEASUREMENT[J]. Chinese Journal of Mechanical Engineering, 1987, 23(4): 13-17 | |
| Authors: | Hou Wenmei Qiu Huifu |
| Affiliation: | The Graduate School Beijing，Shaanxi Institute of Mechanical Engineering |
| Abstract: | BT combining an optical phase comparison method with a Zeemaa-laser, a high resolution heterodyne interference measurement system has been established. It can be used for direct measurement of the refractive index of sir The repeatibility of dm/was determined, In the great number of experiments with 5X10-8. |
| Keywords: | Grinding equipment Grinding process Precision grinding technology oriented to achieve high process efficiency Research summary Large and middle-scale optic |
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