Affiliation: | 1.National Research University of Electronic Technology MIET, 124498, Moscow, Russia ;2.Ryazan State Radio Engineering University, 390005, Ryazan, Russia ;3.Kurnakov Institute of General and Inorganic Chemistry, Russian Academy of Sciences, 119907, Moscow, Russia ;4.R and D Center of Thin-Film Technologies in Energetics, Ltd., 194021, St. Petersburg, Russia ; |