微型气相色谱法测定H2中杂质气体

为了满足氢同位素分离系统、 等离子体排灰气处理系统和贮存与供给工艺系统对进气品质的要求，需建立准确、快速、高精度的杂质气体分析方法。针对H₂中体积分数为10^-2~10^-3的气体组分He、Ne、N₂、Ar、CH₄、CO和CO₂，本研究首先采用配有1个Pora PLOT U通道和1个MS5- 通道的微型气相色谱仪，以H2为载气，建立H2中杂质气体的分析方法并优化测量参数。结果表明，杂质气体组分测量精密度优于0.2%，-0.5%<测量相对误差<0.5%，分离度>1.5，检出限为1.3×10^-6~8.5×10^-6，定量限为4.5×10^-6~36.3×10^-6，分析时间<2.5 min。在优化后的测量条件下探讨分别以He、Ne和Ar为载气测量H2中杂质气体的可行性，得到了标准气体色谱图。所建立方法能够满足工艺系统对进气的分析要求，并可拓展应用到其他氢同位素气体的杂质组分分析。

Determination of Impurity Gas in H2 with Micro Gas Chromatography

In order to meet the requirements of the process system such as ISS, TEP and SDS for the quality of intake air, it is necessary to establish an accurate, fast, and high-precision impurity gas analysis method. Aiming at the gas components He, Ne, N₂, Ar, CH₄, CO and CO₂ with volume fractions of 10^-2~10^-3 in H₂, a miniature channel equipped with one PoraPLOT U channel and one MS5 channel was utilized in this work firstly. Using H₂ as the carrier gas, an analysis method for impurity gases in H₂ was established. Under optimal conditions, the measurement accuracy of impurity gas components is better than 0.2%, the relative measurement error is less than 0.5%, the resolution is greater than 1.5, the detection limit is 1.3×10^-6~8.5×10^-6, and the quantification limit is 4.5×10^-6~36.3×10^-6, and the analysis time is less than 2.5 min. On the basis of the above conditions, the feasibility of measuring impurity gases in H₂ with He, Ne and Ar as the carrier gas respectively was discussed, and the standard spectrum under the best measurement conditions was obtained. The research method can meet the analysis requirements of the process system for the intake air, and can be extended to the analysis of impurity components in other hydrogen isotope gases.