| 引信MEMS静电探测器阵列设计 |
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| 引用本文： | 郝晓辉,徐立新,崔占忠,陈曦. 引信MEMS静电探测器阵列设计[J]. 光学精密工程, 2009, 17(6): 1223-1227 |
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| 作者姓名： | 郝晓辉 徐立新 崔占忠 陈曦 |
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| 作者单位： | 北京理工大学,机电工程与控制国家重点实验室,北京,100081 |
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| 基金项目： | Supported by the Beforehand Research Foundation of National Defence |
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| 摘 要： | 引信可以利用空中目标运动产生的静电场信息对目标进行探测,而MEMS的特殊性能非常适合于引信静电探测器的设计。在引信有限的体积内布设MEMS静电探测阵列,通过对目标静电场信息进行检测,可以获得目标的位置和速度信息。本文运用表面加工工艺设计了一种MEMS薄膜电极的垂直振动式电场传感器阵列。介绍了该电场传感器探测单元及阵列的结构、组成及工作原理,说明了该器件的加工工艺。通过MEMS静电探测单元的空间布阵,研究了引信MEMS静电探测阵列对目标定位的原理,推导了目标定位的公式,使用MEMS静电探测阵列探测了目标的静电场,实现了对目标位置的定位。
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| 关 键 词： | 微机电系统 静电探测阵列 引信 电场传感器 有限元法 |
| 收稿时间： | 2009-01-20 |
| 修稿时间： | 2009-04-30 |
Design of fuze MEMS electrostatic detection array |
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| HAO Xiao-hui,XU Li-xin,CUI Zhan-zhong,CHEN Xi. Design of fuze MEMS electrostatic detection array[J]. Optics and Precision Engineering, 2009, 17(6): 1223-1227 |
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| Authors: | HAO Xiao-hui XU Li-xin CUI Zhan-zhong CHEN Xi |
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| Affiliation: | National Key Laboratory of Mechatronics Engineering and Control;Beijing Institute of Technology;Beijing 100081;China |
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| Abstract: | The motion of a target in air will produce electrostatic fields which can be detected by a fuze to provide some useful information of the target. Moreover,MEMS devices have shown their characteristics of small sizes,low power consumption and high integration to be suitable for design of MEMS electrostatic detection arrays.When a MEMS electrostatic detection array is placed in the limited space of a fuze,the array can acquire the information of position and velocity of the target by detecting electric field ... |
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| Keywords: | MEMS electrostatic detection array fuze electrostatic field sensor finite element method |
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