The design and micromachining of an electromagnetic MEMS flapping-wing micro air vehicle |
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| Authors: | Kun Meng Weiping Zhang Wenyuan Chen Hongyi Li Pengcheng Chi Caijun Zou Xiaosheng Wu Feng Cui Wu Liu Jinge Chen |
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| Affiliation: | (1) National Key Laboratory of Science and Technology on Nano/Micro Fabrication Technology, Research Institute of Mico/Nano Science and Technology, Shanghai Jiao Tong University, Shanghai, 200240, People’s Republic of China;(2) State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, 110016, People’s Republic of China; |
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| Abstract: | An electromagnetic MEMS flapping-wing micro air vehicle at insect scale is presented. The detailed scheme, design, micro fabrication
and experiment are given in this paper. Firstly, by commercial software ANSYS and MATLAB, electromagnetic analysis, modal
analysis and kinetics analysis are proposed. Moreover, based on the result of theoretical analysis, appropriate structure,
material and inherent frequency are selected. Then, a new LIGA-like process based on SU-8 photoresist technology is adopted
to fabricate thorax, tergum and vein. Finally, a 3.5 cm wingspan, 144 mg weight prototype is integrated, and then we finish
the flapping test for this prototype, which has a flapping resonance frequency range of 120–150 Hz. The test result demonstrates
the feasibility solution in the development of FMAV based on MEMS, this work is a stepping-stone on the path toward flying
robotic insects. |
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