| 基于SOI的16通道VMUX器件单片集成 |
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| 引用本文： | 袁配,吴远大,王玥,安俊明,胡雄伟.基于SOI的16通道VMUX器件单片集成[J].半导体学报,2015,36(8):084005-4. |
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| 作者姓名： | 袁配 吴远大 王玥 安俊明 胡雄伟 |
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| 基金项目： | 国家高技术研究发展计划 |
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| 摘 要： | 本文制作了基于绝缘体上硅(SOI)材料的16通道的光功率可调波分复用器(VMUX)，并且采用了脊形波导结构。该器件是由信道间隔100GHz的阵列波导光栅(AWG)及电光型可调光衰减器(VOA)组成，该VOA采用了侧向p-i-n二极管结构。该VMUX器件的插入损耗为9.1dB，串扰为10dB。VOA在衰减量为20dB时的注入电流为60.74mA。器件的整体尺寸为2.9×1mm2。该VMUX器件具备优异的16通道波分复用及光功率均衡的性能。
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| 关 键 词： | AWG VOA SOI monolithic integration planar lightwave circuit (PLC) |
Monolithic integration of a 16-channel VMUX on SOI platform |
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| Yuan Pei,Wu Yuand,Wang Yue,An Junming and Hu Xiongwei.Monolithic integration of a 16-channel VMUX on SOI platform[J].Chinese Journal of Semiconductors,2015,36(8):084005-4. |
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| Authors: | Yuan Pei Wu Yuand Wang Yue An Junming and Hu Xiongwei |
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| Affiliation: | State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China |
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| Abstract: | A 16-channel variable attenuator multiplexer/demultiplexer (VMUX) device is demonstrated. The VMUX is based on a rib-type structure on a silicon-on-insulator (SOI) platform. It consists of a 100-GHz arrayed waveguide grating (AWG) and an electro-optic variable optical attenuator (VOA) array with a p-i-n lateral diode structure. The insertion loss of the demonstrated device is about 9.1 dB and the corresponding crosstalk is about 10 dB. The injected current of the VOA is 60.74 mA at 20 dB attenuation and the whole area of the device is 2.9 × 1 mm2. The VMUX performs an excellent function of wavelength demultiplexing and optical power balancing in 16 channels. |
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| Keywords: | AWG VOA SOI monolithic integration planar lightwave circuit (PLC) |
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