| 薄膜/基体结构的纳米压痕实验及其有限元分析 |
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| 引用本文： | 田正磊,金杰,田省委.薄膜/基体结构的纳米压痕实验及其有限元分析[J].工具技术,2012,46(2):16-19. |
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| 作者姓名： | 田正磊 金杰 田省委 |
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| 作者单位： | 浙江工业大学 |
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| 摘 要： | 利用纳米压痕实验测定了氮化钛薄膜/高速钢基体中薄膜的弹性模量和硬度,并得到了纳米压痕过程的载荷—位移曲线;根据实验所得材料参数建立了纳米压痕实验的DEFORM计算模型,利用该有限元模型分析了不同薄膜厚度的膜/基结合处的切应力分布,研究了膜/基分离的可能性大小及分离位置与薄膜厚度的关系。
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| 关 键 词： | 薄膜/基体 压痕实验 有限元模拟 切应力 薄膜厚度 |
Nanoindentation and FEM Study on Film/Substrate System |
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| Tian Zhenglei
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Jin Jie
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Tian Shengwei.Nanoindentation and FEM Study on Film/Substrate System[J].Tool Engineering(The Magazine for Cutting & Measuring Engineering),2012,46(2):16-19. |
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| Authors: | Tian Zhenglei Jin Jie Tian Shengwei |
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| Affiliation: | Tian Zhenglei,College of Mechanical Engineering,Zhejiang University of Technology,Hangzhou 310014,China,Jin Jie,Tian Shengwei |
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| Abstract: | It study measured the modulus and hardness of the film of Titanium Nitride thin film/High-Speed steel substrate by nanoindentation experiment,and get the load-displacement curve;It simulated the process of the nanoindentation experiment by the DEFORM,and the shear stress of film/substrate is calculated by using FEM,the detachment possibility of film/substrate and the relation between detachment position and film thickness are also investigated. |
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| Keywords: | film/substrate dimensional analysis FEM shear stress thickness of film |
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