激光镀锆/钪钡铝酸盐复合薄膜钪型阴极的研究

钪型阴极具有优异的电子发射潜力，但同时也存在着发射均匀性和重复性差等共性问题。本文提出采用脉冲激光镀膜技术在浸渍钪型阴极表面沉积锆/高活性钪钡铝酸盐复合叠层薄膜，以实现对其性能的改进。实验完成了阴极表面膜层的制备，阴极二极管电子发射性能测试，阴极表面光/热发射电子显微镜观察，以及激活阴极表面成分及其深度方向分布的俄歇电子显微镜分析。研究结果表明，覆膜钪型阴极激活后，其表面Ba、Sc含量提升，获得了约110 ~ 130 nm厚的活性层，阴极展现出良好的发射性能；同时，阴极的表面发射均匀性获得明显提升。

Study on a New Scandate Cathode coated with Zr/ Scandium Barium Aluminate by Pulsed Laser Deposition

_{:Scandatecathodes have excellent electron emission properties, but they also have some problems such as emission non-uniformity and poor repeatability. To improve the performance of the cathodes, a method of depositing a kind of composite film on the surface of scandate cathode by Pulse Laser Deposition technology was proposed. The film was deposited using zirconium and high-active barium aluminate salt target alternately. In the paper, the coated scandate cathode was prepared, and its electron emission performance was tested. The photo/thermal emission electron microscopywasobserved, and auger electron spectroscopy analysis of the composition and its depth distributionof the cathode was also processed. The research results show that more Ba and Sc content were detected on the coated cathode surface after activation. An active layer with thickness of 110} ~ _{130 nm was obtained. The cathode exhibits great emission performance. At the same time, the electron emission uniformity of the cathode is significantly improved.}