Synthesis of silicon and silicon nitride powders by vapour-phase reactions |
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| Authors: | B. W. Jong G. J. Slavens D. E. Traut |
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| Affiliation: | (1) USA Bureau of Mines, Albany Research Center, United States Department of the Interior, 97321 Albany, OR, USA |
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| Abstract: | The Bureau of Mines is investigating vapour-phase reactions for syntheses of high-purity, nanometre-sized silicon and Si3N4 powders suitable for industrial applications. In this study, submicrometre-sized silicon powder was formed by a vapour-phase reaction of SiCl4, NH3, and magnesium vapor at temperatures ranging from 950–1050°C. The silicon was subsequently nitrided to form Si3N4 at 1150°C. |
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