Dielectric and structural characteristics of Ta2O5 anodic films formed in phosphoric acid electrolytes |
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| Authors: | I. Montero J. M. Albella J. M. Martínez-Duart L. Soriano |
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| Affiliation: | (1) Departamento Fisica Aplicada, UAM, CSIC. Universidad Autónoma, Cantoblanco, 28049 Madrid, Spain;(2) Instituto Física Estado Sólido, CSIC. Universidad Autónoma, Cantoblanco, 28049 Madrid, Spain |
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| Abstract: | The duplex nature of Ta2O5 films formed in H3PO4 electrolytes with different concentrations has been chanyotarired by net weight gain measurements of the films during the anodic oxidation, as well by capacitance and etch-rate measurements of the oxide films. The density and permittivity of each layer of the films formed in different concentrations of the electrolyte have been calculated. |
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