薄膜折叠方法制作三维微纳米结构

微光机电系统（MOEMS）是当今技术领域的研究热点之一，无论在军事和商业领域都有广泛的应用。当前MOEMS的制作主要利用二维平面技术，由于二维平面制作技术已经接近物理极限，进一步在二维平面上提高器件密度的难度变得越来越大，充分利用三维空间提高器件的密度有很多优点。本文介绍一种利用晶格失配的外延层自组装制作三维微纳米结构的方法，利用这种办法可以很方便地制作三维微纳米元件，并且在同一个衬底上进行自组装。

Fabrication of 3-D Micro-and Nano-Structures with Membrane Folding

Micro optical electronic mechanical system (MOEMS) is one of the increasingly widespread hot topics in both military and commercial areas. Nowadays the implementation of MOEMS mainly uses 2D planar technology and it is reaching a point where the feature size of planar electronics reaches its minimum physical limit, so it is hard to enhance the device density further. In the realm of microelectronics, the development of third dimension promises opportunities in numerous technological domains. In this paper, ...