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Field‐Induced Nanolithography for High‐Throughput Pattern Transfer |
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| Authors: | Tommi K. Hakala Veikko Linko Antti‐Pekka Eskelinen J. Jussi Toppari Anton Kuzyk Päivi Törmä |
| Affiliation: | 1. Nanoscience Center, Department of Physics University of Jyv?skyl? P.O. Box 35, FI‐40014 (Finland);2. Department of Applied Physics Helsinki University of Technology P.O. Box 5100, FI‐02015 (Finland) |
| Abstract: | |
| Keywords: | dielectrophoresis nanomanipulation pattern transfer quantum dots |